Design of bonding quality testing system for micro device made of transparent materials

A visible light transmittance machine vision detection method was put forward to measure the bonding quality of micro devices made by transparent materials with specific compositions and structures.The performance requirements of main components in the system hardware was analyzed,and the image processing techniques for the detection system were researched.The visible light transmittance machine vision detection system captured the image with the main components of the light source,camera,lens and the computer and implemented quality testing by image subtraction,gray histogram adjustment,image filtering and image binarization.Experimental results indicate that the proposed detection method can detect the bonding gaps of the micro devices made by transparent materials sensitively and effectively,and the detection accuracy of flaw size is about 10 μm.The results meet the detection requirements of micro devices for bonding quality and verify that the method is efficient,non-contact,non-destructive and non-polluting.