Investigation of properties of Cu containing DLC films produced by PECVD process

MLA

Sushil Kumar, et al. “Investigation of Properties of Cu Containing DLC Films Produced by PECVD Process.” Journal of Physics and Chemistry of Solids, vol. 73, Feb. 2012, pp. 308–16. EBSCOhost, https://doi.org/10.1016/j.jpcs.2011.10.019.

APA

Sushil Kumar, Hitendra K. Malik, Saurabh Dayal, Chandra Mohan Singh Rauthan, O. S. Panwar, C. Sreekumar, & Neeraj Dwivedi. (2012). Investigation of properties of Cu containing DLC films produced by PECVD process. Journal of Physics and Chemistry of Solids, 73, 308–316. https://doi.org/10.1016/j.jpcs.2011.10.019

Chicago

Sushil Kumar, Hitendra K. Malik, Saurabh Dayal, Chandra Mohan Singh Rauthan, O. S. Panwar, C. Sreekumar, and Neeraj Dwivedi. 2012. “Investigation of Properties of Cu Containing DLC Films Produced by PECVD Process.” Journal of Physics and Chemistry of Solids 73 (February): 308–16. doi:10.1016/j.jpcs.2011.10.019.