Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization

MLA

Gian Lorusso, et al. “Setting up a Proper Power Spectral Density (PSD) and Autocorrelation Analysis for Material and Process Characterization.” Metrology, Inspection, and Process Control for Microlithography XXXII, Mar. 2018. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........f469a2864a82ea0282142f81ced277a1&authtype=sso&custid=ns315887.

APA

Gian Lorusso, George Papavieros, Vito Rutigliani, Chris A. Mack, Vassilios Constantoudis, Frederic Lazzarino, Evangelos Gogolides, Danilo De Simone, & Gijsbert Rispens. (2018). Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization. Metrology, Inspection, and Process Control for Microlithography XXXII.

Chicago

Gian Lorusso, George Papavieros, Vito Rutigliani, Chris A. Mack, Vassilios Constantoudis, Frederic Lazzarino, Evangelos Gogolides, Danilo De Simone, and Gijsbert Rispens. 2018. “Setting up a Proper Power Spectral Density (PSD) and Autocorrelation Analysis for Material and Process Characterization.” Metrology, Inspection, and Process Control for Microlithography XXXII, March. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........f469a2864a82ea0282142f81ced277a1&authtype=sso&custid=ns315887.