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Finite element simulation and characterization of one-port heterostructured surface acoustic wave resonator
- Source :
- Ferroelectrics. 583:33-40
- Publication Year :
- 2021
- Publisher :
- Informa UK Limited, 2021.
-
Abstract
- The research work presents the study of a heterostructured surface acoustic wave (SAW) resonator consisting of an interdigital transducer (IDT), lithium niobate (LN), and silicon (Si) substrate. In...
- Subjects :
- Materials science
Silicon
Interdigital transducer
business.industry
Lithium niobate
Surface acoustic wave
chemistry.chemical_element
Port (circuit theory)
Substrate (electronics)
Condensed Matter Physics
Electronic, Optical and Magnetic Materials
Characterization (materials science)
chemistry.chemical_compound
Resonator
chemistry
Optoelectronics
business
Subjects
Details
- ISSN :
- 15635112 and 00150193
- Volume :
- 583
- Database :
- OpenAIRE
- Journal :
- Ferroelectrics
- Accession number :
- edsair.doi...........f34344e3760f36d2388826f7bc39d339