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Nanoscale 3-dimensional characterization of wide bandgap power and microdevices
- Source :
- Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2019
- Publisher :
- The Japan Society of Applied Physics, 2019.
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........f3427cd4755598c7fdb9bb396aafe2e3
- Full Text :
- https://doi.org/10.7567/ssdm.2019.f-1-01