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Nanoscale 3-dimensional characterization of wide bandgap power and microdevices

Authors :
L.J. Brillson
H. Gao
C.H. Lin
G. Foster
J. Cox
Source :
Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials.
Publication Year :
2019
Publisher :
The Japan Society of Applied Physics, 2019.

Details

Database :
OpenAIRE
Journal :
Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials
Accession number :
edsair.doi...........f3427cd4755598c7fdb9bb396aafe2e3
Full Text :
https://doi.org/10.7567/ssdm.2019.f-1-01