Back to Search
Start Over
Structure Changes of Amorphous Silicon Carbide Films by Mixture Gas Ratio and Filament Temperature on Cat-CVD
- Source :
- ECS Meeting Abstracts. :88-88
- Publication Year :
- 2010
- Publisher :
- The Electrochemical Society, 2010.
-
Abstract
- not Available.
Details
- ISSN :
- 21512043
- Database :
- OpenAIRE
- Journal :
- ECS Meeting Abstracts
- Accession number :
- edsair.doi...........f23935afee2fc133110b1f594b2e6490
- Full Text :
- https://doi.org/10.1149/ma2010-02/1/88