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Strain Mapping on Semiconductor Device by Dark Field Electron Holography

Authors :
Anthony G. Domenicucci
Yun-Yu Wang
D. Cooper
Jing Li
John Bruley
R Jean-Luc
Source :
Microscopy and Microanalysis. 16:590-591
Publication Year :
2010
Publisher :
Oxford University Press (OUP), 2010.

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Details

ISSN :
14358115 and 14319276
Volume :
16
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........f1895ce5a1df83ac75b0fa49bec9ea7e
Full Text :
https://doi.org/10.1017/s1431927610063129