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Strain Mapping on Semiconductor Device by Dark Field Electron Holography
- Source :
- Microscopy and Microanalysis. 16:590-591
- Publication Year :
- 2010
- Publisher :
- Oxford University Press (OUP), 2010.
-
Abstract
- Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
Details
- ISSN :
- 14358115 and 14319276
- Volume :
- 16
- Database :
- OpenAIRE
- Journal :
- Microscopy and Microanalysis
- Accession number :
- edsair.doi...........f1895ce5a1df83ac75b0fa49bec9ea7e
- Full Text :
- https://doi.org/10.1017/s1431927610063129