Evaluation of Pure Novolak Cresol‐Formaldehyde Resins for Deep U.V. Lithography

Subjects

Subjects :

Materials science
Renewable Energy, Sustainability and the Environment
Materials Chemistry
Electrochemistry
CRESOL/FORMALDEHYDE
Condensed Matter Physics
Lithography
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Nuclear chemistry

Details

ISSN :

19457111 and 00134651

Volume :

129

Database :

OpenAIRE

Journal :

Journal of The Electrochemical Society

Accession number :

edsair.doi...........f154b4214882fdbc0e0066da654eb77e

Full Text :

https://doi.org/10.1149/1.2123757