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P-83: Comparison of Characteristic Pattern Form along the Photo-resist Binders

Authors :
Mike Jun
In-Boung Kang
Da-Eun Kim
Mu-Sun Kwak
Sang-Hun Han
Jun-Ho Lee
Sang-Wook Lee
Source :
SID Symposium Digest of Technical Papers. 48:1554-1557
Publication Year :
2017
Publisher :
Wiley, 2017.

Details

ISSN :
0097966X
Volume :
48
Database :
OpenAIRE
Journal :
SID Symposium Digest of Technical Papers
Accession number :
edsair.doi...........f13a34b8a511ad9bd819458d7e1e3a56
Full Text :
https://doi.org/10.1002/sdtp.11947