In-line monitoring of advanced microelectronic processes using combined X-ray techniques

MLA

L. Perino-Gallice, et al. “In-Line Monitoring of Advanced Microelectronic Processes Using Combined X-Ray Techniques.” Thin Solid Films, vol. 450, Feb. 2004, pp. 84–89. EBSCOhost, https://doi.org/10.1016/j.tsf.2003.10.159.

APA

L. Perino-Gallice, I. Mazor, J.‐P. Gonchond, C. Wyon, L. Kwakman, D. Delille, D. Muyard, S. Marthon, A. Michallet, A. Tokar, F. Heider, & J.C. Royer. (2004). In-line monitoring of advanced microelectronic processes using combined X-ray techniques. Thin Solid Films, 450, 84–89. https://doi.org/10.1016/j.tsf.2003.10.159

Chicago

L. Perino-Gallice, I. Mazor, J.‐P. Gonchond, C. Wyon, L. Kwakman, D. Delille, D. Muyard, et al. 2004. “In-Line Monitoring of Advanced Microelectronic Processes Using Combined X-Ray Techniques.” Thin Solid Films 450 (February): 84–89. doi:10.1016/j.tsf.2003.10.159.