Back to Search Start Over

Stacking two superconducting nanowire single-photon detectors via membrane microchip transfer

Authors :
Shi Chen
Qing-Yuan Zhao
Kai Zheng
Xu Tao
Jia-Wei Guo
Zhen Liu
Hui Wang
Ling-Dong Kong
Hao Hao
Yang-Hui Huang
Tao Xu
Xue-Cou Tu
La-Bao Zhang
Xiao-Qing Jia
Jian Chen
Lin Kang
Pei-Heng Wu
Source :
Applied Physics Letters. 121:112601
Publication Year :
2022
Publisher :
AIP Publishing, 2022.

Abstract

Multilayer superconducting nanowire single-photon detectors (SNSPDs) have exhibited several advantages, such as increased detection efficiency, reduced polarization sensitivity, and scaling up to large arrays. However, monolithic fabrication of such multilayer devices is challenging. In this work, a hybrid integration method has been introduced by etching SNSPDs into the membrane microchips, followed by the pick and place transferring process. This method has been verified by stacking two SNSPDs orthogonally. Both detectors show near saturated detection efficiencies and low timing jitters. Furthermore, thermal coupling effects have been observed between the two SNSPDs. The photon detection pulses from either detector can trigger the other one almost deterministically with a latency of several nanoseconds. This method offers a flexible way to fabricate multilayer SNSPDs or integrate them with other heterogeneous devices.

Details

ISSN :
10773118 and 00036951
Volume :
121
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........f0acad5428084742410fc2db22961889
Full Text :
https://doi.org/10.1063/5.0118213