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Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics
- Source :
- Conference on Lasers and Electro-Optics 2010.
- Publication Year :
- 2010
- Publisher :
- OSA, 2010.
-
Abstract
- We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si∶H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.
- Subjects :
- Amorphous silicon
Materials science
Laser ablation
Excimer laser
Silicon
business.industry
medicine.medical_treatment
chemistry.chemical_element
Condensed Matter::Disordered Systems and Neural Networks
Condensed Matter::Materials Science
Field electron emission
chemistry.chemical_compound
chemistry
Molybdenum
Electric field
Physics::Atomic and Molecular Clusters
medicine
Microelectronics
Optoelectronics
Physics::Atomic Physics
business
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Conference on Lasers and Electro-Optics 2010
- Accession number :
- edsair.doi...........ef30d8a47da878ba1f3e22ded43c53f5
- Full Text :
- https://doi.org/10.1364/cleo.2010.jtud17