Ion beam assisted deposition of diamond-like nanocomposite films in an acetylene atmosphere

In recent years, doped diamond-like carbon (DLC) coatings have been shown to solve some intrinsic application difficulties of DLC, esp. reducing internal stresses and improving thermal stability. Diamond-like nanocomposite (DLN), by incorporating an amorphous Si-O network into the DLC, is a special class of modified DLC coatings, which have many excellent properties and wide applications. In this paper, a diamond-like nanocomposite film was synthesized by an ion beam assisted deposition method in an acetylene atmosphere. The composition and microstructure of the DLN film were investigated by various spectroscopic analyses, including Fourier transform infrared absorption spectroscopy, Rutherford backscattering spectroscopy. Raman scattering spectroscopy, X-ray photoelectron spectroscopy, and ultraviolet-visible absorption spectroscopy.