Effects of seed layer thickness and post-annealing process on crystalline quality of β-Ga2O3 films prepared on Si (100) substrate by RF magnetron sputtering

Authors :: Wei Mi
Xinwei Li
Yue Ding
Di Wang
Mingsheng Xu
Longfei Xiao
Xingcheng Zhang
Xinrong Chen
Bingkun Li
Liyuan Luo
Jinshi Zhao
Liwei Zhou
Junli Yu
Source :: Vacuum. 214:112235
Publication Year :: 2023
Publisher :: Elsevier BV, 2023.

Subjects :: Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films

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