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Enhanced Metal-Assisted Chemical Etching of Silicon Nanopores via Localized Surface Plasmon Resonance

Authors :
Te-Chang Chen
Ming-Chang M. Lee
Ta-Jen Yen
Ming-Hung Lai
Source :
Nanoscience and Nanotechnology Letters. 6:477-480
Publication Year :
2014
Publisher :
American Scientific Publishers, 2014.

Subjects

Subjects :
Materials science
Silicon
business.industry
Surface plasmon
chemistry.chemical_element
Isotropic etching
Metal
Nanopore
chemistry
visual_art
visual_art.visual_art_medium
Optoelectronics
General Materials Science
Surface plasmon resonance
business
Localized surface plasmon

Details

ISSN :
19414919 and 19414900
Volume :
6
Database :
OpenAIRE
Journal :
Nanoscience and Nanotechnology Letters
Accession number :
edsair.doi...........edc87002687b29f4fc15f450f7aaa177
Full Text :
https://doi.org/10.1166/nnl.2014.1791
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