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Comment on the paper 'failure of aluminium contacts to silicon in shallow diffused transistors'

Authors :
R.H. Wakefield
J.A. Cunningham
Source :
Microelectronics Reliability. 9:515-516
Publication Year :
1970
Publisher :
Elsevier BV, 1970.

Subjects

Subjects :
Materials science
Silicon
Transistor
chemistry.chemical_element
Condensed Matter Physics
Engineering physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
law.invention
chemistry
Aluminium
law
Electronic engineering
Electrical and Electronic Engineering
Safety, Risk, Reliability and Quality

Details

ISSN :
00262714
Volume :
9
Database :
OpenAIRE
Journal :
Microelectronics Reliability
Accession number :
edsair.doi...........ecfa9999bcfd1f1f3d7f4bff8cf88da3
Full Text :
https://doi.org/10.1016/0026-2714(70)90239-8
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