Ultrashallow P$^+$/N Junction Formation by Plasma Ion Implantation

Authors :: Tae Yeon Seong
Sungkwon Baek
Dae Won Moon
Hanchul Kim
Chel-Jong Choi
Hyunsang Hwang
Source :: Journal of the Korean Physical Society. 37:912
Publication Year :: 2000
Publisher :: Korean Physical Society, 2000.

Subjects :: Ion implantation
Materials science
Analytical chemistry
General Physics and Astronomy
Plasma
p–n junction

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