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Polycrystalline and high purity SnO2 films by plasma-enhanced atomic layer deposition using H2O plasma at very low temperatures of 60–90 °C
- Source :
- Vacuum. 196:110739
- Publication Year :
- 2022
- Publisher :
- Elsevier BV, 2022.
-
Abstract
- High-quality SnO2 films with excellent crystallinities, purities, and high densities grown at low deposition temperatures (
Details
- ISSN :
- 0042207X
- Volume :
- 196
- Database :
- OpenAIRE
- Journal :
- Vacuum
- Accession number :
- edsair.doi...........eaff3a3d1f59721fc0b16783f57afc94
- Full Text :
- https://doi.org/10.1016/j.vacuum.2021.110739