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Fast chemical thinning of germanium wafers for optoelectronic applications

Authors :
Clara Sanchez-Perez
Ivan Garcia
Ignacio Rey-Stolle
Source :
Applied Surface Science. 579:152199
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Subjects

Subjects :
General Physics and Astronomy
Surfaces and Interfaces
General Chemistry
Condensed Matter Physics
Surfaces, Coatings and Films

Details

ISSN :
01694332
Volume :
579
Database :
OpenAIRE
Journal :
Applied Surface Science
Accession number :
edsair.doi...........eab19cca08f61097d28630689caea5c3
Full Text :
https://doi.org/10.1016/j.apsusc.2021.152199
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