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Inductively coupled plasma etching of LiTaO3 in CHF3/Ar plasmas

Authors :
Z. Q. Zhong
Z. G. Chen
W. B. Luo
M. C. Cao
S. Y. Wang
N. H. Li
Source :
Ferroelectrics. 600:24-34
Publication Year :
2022
Publisher :
Informa UK Limited, 2022.

Subjects

Subjects :
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Details

ISSN :
15635112 and 00150193
Volume :
600
Database :
OpenAIRE
Journal :
Ferroelectrics
Accession number :
edsair.doi...........ea6c81fb76d84c3aa5758ace87c1e360
Full Text :
https://doi.org/10.1080/00150193.2022.2115814
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