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Simultaneous atomic force microscopy measurement of topography and contact resistance of metal films and carbon nanotubes

Authors :
Michael R. Falvo
Stergios J. Papadakis
Holger Grube
R. Superfine
John J. Boland
Michael Stadermann
Sean Washburn
Source :
Review of Scientific Instruments. 74:3653-3655
Publication Year :
2003
Publisher :
AIP Publishing, 2003.

Abstract

We present a quartz tuning-fork-based atomic force microscopy (AFM) setup that is capable of mapping the surface contact resistance while scanning topography. The tuning-fork setup allows us to use etched Pt/Ir tips, which have higher durability and better conductivity than probes used in earlier AFM conductance measurements. The performance of the method is demonstrated with contact resistance measurements of gold lines on silicon dioxide and carbon nanotubes on graphite.

Details

ISSN :
10897623 and 00346748
Volume :
74
Database :
OpenAIRE
Journal :
Review of Scientific Instruments
Accession number :
edsair.doi...........e91030a1519eeaf6dd652ff2e6415878