Back to Search
Start Over
Low-order models for fast dynamical simulation of MEMS microstructures
- Source :
- Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- In this paper, are describe how a few simulations of fully meshed dynamical problems can be used to construct efficient low-order models for system-level design of microstructures. We report on the use of this method to capture the measured behaviour of a pressure sensor based on the pull-in time of a beam. Results show that the reduced order model decreases simulation time by at least a factor of 37 while achieving good agreement with experimental data.
Details
- Database :
- OpenAIRE
- Journal :
- Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
- Accession number :
- edsair.doi...........e87fad23d2c12a1caa38147f2d0e8340
- Full Text :
- https://doi.org/10.1109/sensor.1997.635392