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Low-order models for fast dynamical simulation of MEMS microstructures

Authors :
Stephen D. Senturia
Yao-Joe Yang
Elmer S. Hung
Source :
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
Publication Year :
2002
Publisher :
IEEE, 2002.

Abstract

In this paper, are describe how a few simulations of fully meshed dynamical problems can be used to construct efficient low-order models for system-level design of microstructures. We report on the use of this method to capture the measured behaviour of a pressure sensor based on the pull-in time of a beam. Results show that the reduced order model decreases simulation time by at least a factor of 37 while achieving good agreement with experimental data.

Details

Database :
OpenAIRE
Journal :
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Accession number :
edsair.doi...........e87fad23d2c12a1caa38147f2d0e8340
Full Text :
https://doi.org/10.1109/sensor.1997.635392