Substantiation of the technology for controlling the process of low-temperature plasma modification of metal product surface layer by the electrical signal parameters

A further increase in the efficiency of low-temperature plasma modification of the metal product surface layer is possible on the basis of the process supervision. The article presents an approach and a developed model that allows to receive and study the behavior of signals arising in the electrical circuit of a technological unit under the interaction of electromagnetic and electrostatic fields that form a low-temperature plasma gas discharge near the product surface. Data confirming the v alidity of the model are presented. The analysis of electrical signals is carried out. The indicator reflecting the stability of the process of plasma interaction with the product surface by the degree of the signal form deviation from the sine curve is substantiated. The study of the possibility to control the modification process was carried out. The dependences of the stability index on the product parameter values as functions of the process operating parameters — bias potential or magnetron anode current — were obtained and studied. The reliability of the theoretical studies results was experimentally confirmed, which showed that the composite structure synthesis process remains the most stable with a smooth decrease in the bias potential, as well as a smooth and abrupt increase in the magnetron anode current.