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Evolution of nitrogen pairs and nitrogen‐oxygen complexes in nitrogen‐doped Czochralski silicon

Authors :
Xiangyang Ma
Duanlin Que
Can Cui
Deren Yang
Ming Li
Source :
physica status solidi c. 4:3090-3094
Publication Year :
2007
Publisher :
Wiley, 2007.

Abstract

By means of Fourier-transform infrared absorption spectroscopy, the evolution of nitrogen pairs (N-N) and nitrogen-oxygen complex (NNO) in nitrogen doped Czochralski (NCZ) silicon annealed at 650 °C has been investigated. The evolution of N-N pairs and NNO complexes has been semi-quantitatively elucidated based on the diffusion-limited reaction theory. It is pointed out that the N-O pairs and NNO complexes react with the interstitial atoms, leading to NNOx (x ≥ 1) particles, which serve as the nuclei of oxygen precipitate. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

Details

ISSN :
16101642 and 18626351
Volume :
4
Database :
OpenAIRE
Journal :
physica status solidi c
Accession number :
edsair.doi...........e78aae98efdf9f8d5768d4ea74208a0b
Full Text :
https://doi.org/10.1002/pssc.200675475