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Evolution of nitrogen pairs and nitrogen‐oxygen complexes in nitrogen‐doped Czochralski silicon
- Source :
- physica status solidi c. 4:3090-3094
- Publication Year :
- 2007
- Publisher :
- Wiley, 2007.
-
Abstract
- By means of Fourier-transform infrared absorption spectroscopy, the evolution of nitrogen pairs (N-N) and nitrogen-oxygen complex (NNO) in nitrogen doped Czochralski (NCZ) silicon annealed at 650 °C has been investigated. The evolution of N-N pairs and NNO complexes has been semi-quantitatively elucidated based on the diffusion-limited reaction theory. It is pointed out that the N-O pairs and NNO complexes react with the interstitial atoms, leading to NNOx (x ≥ 1) particles, which serve as the nuclei of oxygen precipitate. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
Details
- ISSN :
- 16101642 and 18626351
- Volume :
- 4
- Database :
- OpenAIRE
- Journal :
- physica status solidi c
- Accession number :
- edsair.doi...........e78aae98efdf9f8d5768d4ea74208a0b
- Full Text :
- https://doi.org/10.1002/pssc.200675475