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An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry
- Source :
- Rapid Communications in Mass Spectrometry. 15:1621-1624
- Publication Year :
- 2001
- Publisher :
- Wiley, 2001.
-
Abstract
- An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry (SIMS) is presented. The coatings, whose composition ranged between CoO and Co3O4, were synthesized by chemical vapor deposition (CVD) on indium tin oxide (ITO) substrates, using cobalt(II) β-diketonate as precursor. The SIMS analysis revealed a satisfactory precursor conversion into the oxides and allowed distinction of regions in the films at different compositions. Film-substrate intermixing phenomena were evidenced and studied as a function of deposition temperature, film thickness and composition. Copyright © 2001 John Wiley & Sons, Ltd.
- Subjects :
- Static secondary-ion mass spectrometry
Organic Chemistry
Analytical chemistry
chemistry.chemical_element
Chemical vapor deposition
Nanocrystalline thin films
Analytical Chemistry
Deposition temperature
Indium tin oxide
Secondary ion mass spectrometry
chemistry
Chemical engineering
Cobalt oxide
Cobalt
Spectroscopy
Subjects
Details
- ISSN :
- 10970231 and 09514198
- Volume :
- 15
- Database :
- OpenAIRE
- Journal :
- Rapid Communications in Mass Spectrometry
- Accession number :
- edsair.doi...........e73ef39e017254515f9c51849ea8c4d9