Traceable Nanomechanical Metrology of GaN Micropillar Array

Authors :: Muhammad Fahlesa Fatahilah
Andreas Waag
Min Xu
Jannick Langfahl-Klabes
Uwe Brand
Andre Felgner
Hutomo Suryo Wasisto
Frank Pohlenz
Prabowo Puranto
Klaas Strempel
Erwin Peiner
Feng Yu
Zhi Li
Source :: Advanced Engineering Materials. 20:1800353
Publication Year :: 2018
Publisher :: Wiley, 2018.

Subjects :: 010302 applied physics
Materials science
Nanometrology
0103 physical sciences
General Materials Science
Nanotechnology
02 engineering and technology
Nanoindentation
021001 nanoscience & nanotechnology
0210 nano-technology
Condensed Matter Physics
01 natural sciences
Metrology

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