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An investigation of dopant gases in plasma immersion ion implantation

Authors :
Shu Qin
James D. Bernstein
Zhuofan Zhao
Chung Chan
Jiqun Shao
Stuart Denholm
Publication Year :
1996
Publisher :
Elsevier, 1996.

Details

Database :
OpenAIRE
Accession number :
edsair.doi...........e620292597a1f0e9a689ace244b7383d

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