Back to Search Start Over

Diffusion studies of Ra and Pb in GaAs by the alpha-particle energy loss method

Authors :
Thomas Tiedje
I. Kelson
M. Beaudoin
Yuval Levy
M. Adamcyk
Source :
Journal of Applied Physics. 84:6003-6006
Publication Year :
1998
Publisher :
AIP Publishing, 1998.

Abstract

The temperature dependence of the diffusion of lead in GaAs is determined by measuring the modification to the energy spectrum of emitted alpha particles from the decay chain of implanted 212Pb atoms. Diffusion rates are measured for temperatures up to 900 °C. Higher rates are observed for the diffusion in silicon-doped GaAs than in semi-insulating GaAs. An upper limit for the diffusion of radium in GaAs is similarly obtained from the decay of the 224Ra isotope. Implications for the use of implanted alpha sources for thickness monitoring during epitaxial film growth by the alpha-particle energy loss method are discussed.

Details

ISSN :
10897550 and 00218979
Volume :
84
Database :
OpenAIRE
Journal :
Journal of Applied Physics
Accession number :
edsair.doi...........e52a45580f16a95f0de42867350edb57