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Carbon Nanotubes: Can they become a microelectronics technology?

Authors :
Andrew Graham
Maik Liebau
Wolfgang Hoenlein
Georg S. Duesberg
Eugen Unger
Franz Kreupl
Robert Seidel
Source :
AIP Conference Proceedings.
Publication Year :
2004
Publisher :
AIP, 2004.

Abstract

Carbon nanotubes (CNTs) have a large variety of properties that make them attractive for applications in microelectronics. A comparison of carbon nanotube field‐effect transistors with silicon MOSFETs shows that CNT devices outperform state‐of‐the‐art silicon transistors. A silicon technology review gives the benchmark for an assessment of the current CNT technology and identifies the growth and placement procedures that are not yet sufficient for industrial applications. Finally, the vertical CNT transistor concept is introduced which deals with the technological problems and opens a new route for 3D integration.

Details

ISSN :
0094243X
Database :
OpenAIRE
Journal :
AIP Conference Proceedings
Accession number :
edsair.doi...........e508349ea16ba9c1e7c614267b6f3881
Full Text :
https://doi.org/10.1063/1.1812152