Model Prediction of Microcantilever using DOE for Stress and Eigen Frequency Analysis for Force Measurement

In this paper, stress and eigen frequencies are analyzed through prediction of microcantilever model using design of experiment approach. The important factors affecting displacement sensitivity, stress and eigen frequencies were identified such as geometrical dimensions of microcantilever (length, breadth and thickness), modulus of elasticity of materials, applied force. Based on the selection of factors and levels, experiments were designed using L9 orthogonal array. The designed experiments were simulated with finite element method in COMSOL Multiphysics software. Further, optimum values of dimensions of microcantilever and material property are used for stress and eigen frequencies analysis. The evaluated frequencies under eigen frequency analysis revealed that designed and simulated Gallium Arsenide (GaAs) microcantilever is prone to vibrate at these frequencies, whereas stress analysis illustrates the response of structure and material properties towards reliability.