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Introduction to SiC and Thermoelectrical Properties

Authors :
Nam-Trung Nguyen
Toan Dinh
Dzung Viet Dao
Source :
Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors ISBN: 9789811325700
Publication Year :
2018
Publisher :
Springer Singapore, 2018.

Abstract

This chapter presents the general background on silicon carbide as a functional semiconductor for sensors operating in harsh environments. The fundamental stacking orders of different SiC polytypes with common growth methods and conditions are introduced, with a focus on cubic silicon carbide (3C-SiC) and hexagonal silicon carbide (e.g. 4H-SiC and 6H-SiC). This chapter also introduces the thermoelectrical effect in SiC with respect to sensing properties at high temperatures. The importance of SiC materials with a wide range of applications in harsh environments will be mentioned.

Details

Database :
OpenAIRE
Journal :
Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors ISBN: 9789811325700
Accession number :
edsair.doi...........e4c65027be85a74fc4a8077fc4d1c940
Full Text :
https://doi.org/10.1007/978-981-13-2571-7_1