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Introduction to SiC and Thermoelectrical Properties
- Source :
- Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors ISBN: 9789811325700
- Publication Year :
- 2018
- Publisher :
- Springer Singapore, 2018.
-
Abstract
- This chapter presents the general background on silicon carbide as a functional semiconductor for sensors operating in harsh environments. The fundamental stacking orders of different SiC polytypes with common growth methods and conditions are introduced, with a focus on cubic silicon carbide (3C-SiC) and hexagonal silicon carbide (e.g. 4H-SiC and 6H-SiC). This chapter also introduces the thermoelectrical effect in SiC with respect to sensing properties at high temperatures. The importance of SiC materials with a wide range of applications in harsh environments will be mentioned.
- Subjects :
- 010302 applied physics
Microelectromechanical systems
Materials science
Hexagonal crystal system
business.industry
Cubic silicon carbide
Stacking
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Engineering physics
chemistry.chemical_compound
Semiconductor
chemistry
0103 physical sciences
Silicon carbide
0210 nano-technology
business
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors ISBN: 9789811325700
- Accession number :
- edsair.doi...........e4c65027be85a74fc4a8077fc4d1c940
- Full Text :
- https://doi.org/10.1007/978-981-13-2571-7_1