Electrochemical post-processing of LIGA structures

The Louisiana State University (LSU) Microsystems Engineering Team (μSET) is developing techniques for producing microstructures with predictable 3-D geometry. One approach is based on controlled anodic dissolution of electroplated structures to obtain desired shapes. A finite element model was developed to predict the resulting shapes. As a demonstration of the shaping process, development of LIGA-based scanning probe microscope tips was investigated. An array of micro-posts 1.8 micrometers in diameter and 12 micrometers high was produced using x-ray lithography and subsequent electrodeposition. The posts were sharpened electrochemically. Other geometries are being investigated.