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A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors

Authors :
Fengqi Liu
Li-An Li
Fang-Yuan Zhao
Shenqiang Zhai
Zhong-Ming Wei
Source :
Rare Metals. 41:319-324
Publication Year :
2021
Publisher :
Springer Science and Business Media LLC, 2021.

Details

ISSN :
18677185 and 10010521
Volume :
41
Database :
OpenAIRE
Journal :
Rare Metals
Accession number :
edsair.doi...........e41a449b58b746268ca17a3da9c23ab4
Full Text :
https://doi.org/10.1007/s12598-021-01787-0