Cite
Pressure and angle of incidence effects in reactive planar magnetron sputtered ZnO layers
MLA
S. Maniv, et al. “Pressure and Angle of Incidence Effects in Reactive Planar Magnetron Sputtered ZnO Layers.” Journal of Vacuum Science and Technology, vol. 20, Feb. 1982, pp. 162–70. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........e3ad14a94b1517709d0ae7ecff70fddf&authtype=sso&custid=ns315887.
APA
S. Maniv, E. Colombini, & W. D. Westwood. (1982). Pressure and angle of incidence effects in reactive planar magnetron sputtered ZnO layers. Journal of Vacuum Science and Technology, 20, 162–170.
Chicago
S. Maniv, E. Colombini, and W. D. Westwood. 1982. “Pressure and Angle of Incidence Effects in Reactive Planar Magnetron Sputtered ZnO Layers.” Journal of Vacuum Science and Technology 20 (February): 162–70. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........e3ad14a94b1517709d0ae7ecff70fddf&authtype=sso&custid=ns315887.