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Study of Novel EUV Absorber：Nickel & Nickel Oxide
- Source :
- Korean Journal of Metals and Materials. 55
- Publication Year :
- 2017
- Publisher :
- The Korean Institute of Metals and Materials, 2017.
- Subjects :
- Materials science
business.industry
Extreme ultraviolet lithography
Nickel oxide
Metals and Alloys
chemistry.chemical_element
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
010309 optics
Nickel
Semiconductor
chemistry
Modeling and Simulation
0103 physical sciences
Optoelectronics
X-ray lithography
Thin film
0210 nano-technology
business
Subjects
Details
- ISSN :
- 22888241 and 17388228
- Volume :
- 55
- Database :
- OpenAIRE
- Journal :
- Korean Journal of Metals and Materials
- Accession number :
- edsair.doi...........e2603035fcc3aaf23df4f97b82a2eb3c
- Full Text :
- https://doi.org/10.3365/kjmm.2017.55.3.198