Growth of zinc oxide films by a novel ultrasonic nebulization and pyrolysis method

Films of ZnO have been grown on various substrates by an ultrasonic nebulization and pyrolysis method. The resulting films were characterized by x-ray diffraction, optical and electrical measurements. They were found to be single-phase, homogeneous, and uniform in thicknes. These films are comparable in quality to films prepared by more elaborate methods. Zinc oxide films are useful in a number of semiconductor applications.