A single-crystal silicon micromirror for large bi-directional 2D scanning applications

This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc.