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Transport of oxygen in amorphous Ge thin films during annealing
- Source :
- Journal of Vacuum Science and Technology. 12:117-120
- Publication Year :
- 1975
- Publisher :
- American Vacuum Society, 1975.
-
Abstract
- Both direct and indirect evidence has suggested that low−density a−Ge films grown at substrate temperatures Ts
Details
- ISSN :
- 00225355
- Volume :
- 12
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science and Technology
- Accession number :
- edsair.doi...........e095d3485b2849f07b8f0f9b0e8d6af9
- Full Text :
- https://doi.org/10.1116/1.568737