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Solvent influence upon structure & throughput of poly vinyledene fluoride thin film nano-patterns by imprint lithography

Authors :
R. B. Gangineni
M. S. Ravi Sankar
Source :
AIP Conference Proceedings.
Publication Year :
2018
Publisher :
Author(s), 2018.

Abstract

This work aims at understanding the solvent influence upon the throughput and structure of poly vinyledene fluoride (PVDF)nano-patterned films. The PVDF thin films are deposited by spin coating method using Dimethylsulfoxide (DMSO), Tetrahydrofuran (THF) and 2-butanone solvents. The nano-patterns are realized by imprinting SONY 700 MB CD aluminum constructions on PVDF thin filmsusing imprint lithography technique under ambient annealing temperature and pressure. Surface morphology &imprint pattern transfer quality is evaluated with Atomic force microscopy (AFM). Raman spectroscopy is used for evaluating the structural evolutions with respect to solvent & patterning.

Details

ISSN :
0094243X
Database :
OpenAIRE
Journal :
AIP Conference Proceedings
Accession number :
edsair.doi...........e076f5c527649c72235e9ad3925c7591