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High Fill-Factor Arrays of Flexure Hinge Type Micromirrors for Multi Object Spectroscopy
- Source :
- IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006..
- Publication Year :
- 2006
- Publisher :
- IEEE, 2006.
-
Abstract
- Micromirror arrays have been fabricated dedicated to astronomical instrumentation. The 100times200 mum2 sized micromirrors show an excellent optical surface quality and can be electrostatically tilted by 20deg. A system of multiple landing beams have been implemented, which forces uniform tilt angle
Details
- Database :
- OpenAIRE
- Journal :
- IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.
- Accession number :
- edsair.doi...........dfb78c62eba2e709711095aa3637f209
- Full Text :
- https://doi.org/10.1109/omems.2006.1708258