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Fabrication of Electrospray Thrusters with a High-Density Emitter Array Utilizing Minimal-Fab System
- Source :
- 2018 31st International Vacuum Nanoelectronics Conference (IVNC).
- Publication Year :
- 2018
- Publisher :
- IEEE, 2018.
-
Abstract
- Using a fabrication technology of field emitter arrays (FEAs), we have fabricated a high-density emitter array with 5-10 \mu m pitch as ion sources to improve the thrust density of electrospray thrusters. The emitter array is made on a Si wafer and consists of double Nb electrodes with sub-\mu m apertures, where ionic liquid as the propellant is expected to be extracted by applying voltage to the electrodes. This array can realize the emitter density of up to four million/cm2, which is four orders of magnitude higher than that of conventional electrospray thrusters.
- Subjects :
- Propellant
0209 industrial biotechnology
Electrospray
Fabrication
Materials science
business.industry
Orders of magnitude (temperature)
02 engineering and technology
021001 nanoscience & nanotechnology
020901 industrial engineering & automation
Physics::Plasma Physics
Electrode
Physics::Accelerator Physics
Optoelectronics
Wafer
0210 nano-technology
business
Voltage
Common emitter
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2018 31st International Vacuum Nanoelectronics Conference (IVNC)
- Accession number :
- edsair.doi...........df52f8d494717944363b2d0a55b8ba19