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Mechanical properties of TiN films prepared in glow-arc transition region
- Source :
- Surface Engineering. 37:154-159
- Publication Year :
- 2020
- Publisher :
- Informa UK Limited, 2020.
-
Abstract
- Titanium nitride (TiN) films were generated in the abnormal glow discharge (AGD) region and the glow-arc transition discharge (GATD) region by varying target current density (Ja) in an Ar/N2 atmosp...
- Subjects :
- 010302 applied physics
Glow discharge
Materials science
chemistry.chemical_element
02 engineering and technology
Surfaces and Interfaces
Adhesion
Sputter deposition
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Titanium nitride
Surfaces, Coatings and Films
Arc (geometry)
chemistry.chemical_compound
chemistry
0103 physical sciences
Materials Chemistry
Composite material
0210 nano-technology
Tin
Current density
Subjects
Details
- ISSN :
- 17432944 and 02670844
- Volume :
- 37
- Database :
- OpenAIRE
- Journal :
- Surface Engineering
- Accession number :
- edsair.doi...........df338a2b83e75d2ee3a67a3e0a3c0fcf
- Full Text :
- https://doi.org/10.1080/02670844.2020.1778412