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A Study on Detection Method Using 2-Class Classifiers for Defective Wafer Maps

Authors :
Seima Sakaguchi
Yasushi Arimura
Takayuki Yamauchi
Yuichi Tokuyama
Tomoya Kawai
Hidetaka Eguchi
Hiroyuki Morinaga
Hiroharu Kawanaka
Tetsushi Wakabayashi
Source :
2022 International Symposium on Semiconductor Manufacturing (ISSM).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 International Symposium on Semiconductor Manufacturing (ISSM)
Accession number :
edsair.doi...........df1ef789a6f19068978cf0e229aecc7e
Full Text :
https://doi.org/10.1109/issm55802.2022.10026916
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