Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic

Authors :: 丛敏 Cong Min
于海利 Yu Haili
糜小涛 Mi Xiao-tao
齐向东 Qi Xiangdong
卢禹先 Lu Yuxian
李晓天 Li Xiaotian
Source :: Optics and Precision Engineering. 25:3027-3033
Publication Year :: 2017
Publisher :: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2017.

Subjects :: Physics
business.industry
02 engineering and technology
Replication (microscopy)
Grating
021001 nanoscience & nanotechnology
01 natural sciences
Ray
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
010309 optics
Optics
Optical path
0103 physical sciences
0210 nano-technology
business

Full Text Access

Tools