Back to Search Start Over

What is the role of the metal on the Fermi-level position at the interface with IV-IV compounds?

Authors :
J.L. Regolini
F. Meyer
Christer Fröjdh
J.-L. Perrossier
C. S. Peterson
V. Aubry-Fortuna
S. Bodnar
M. Mamor
Göran Thungström
Source :
Microelectronic Engineering. :573-579
Publication Year :
1997
Publisher :
Elsevier BV, 1997.

Abstract

The Schottky barrier height of Ti and W on n-type and p-type Si 1− x − y Ge x C y alloys has been investigated as a function of the composition and for different states of strain of the epilayers. The barrier on p-type, Φ Bp , differs slightly on the metal. However, the variation of the band gap is better correlated to the barrier heights to W than those to Ti. In the case of n-type, the addition of Ge in Si does not modify the position of the Fermi level at the interface with W, while it strongly shifts E F towards the valence band at the interface with Ti. In addition, we have observed a degradation of the interfaces for the high Ge content, and this degradation is more pronounced for Ti. In conclusion, the dependence of the Schottky barrier height on the metal workfunction is more reduced for IV-IV compounds than for pure Si and the addition of Ge leads to a change in the Fermi level pinning position with Ti.

Details

ISSN :
01679317
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........dd6110c590318d7a7df26c04b80f6faf
Full Text :
https://doi.org/10.1016/s0167-9317(97)00162-7