Back to Search
Start Over
Identification of Film-Forming Species during SiC-CVD of CH3SiCl3/H2 by Exploiting Deep Microtrenches
- Source :
- ECS Journal of Solid State Science and Technology. 8:P423-P429
- Publication Year :
- 2019
- Publisher :
- The Electrochemical Society, 2019.
Details
- ISSN :
- 21628777 and 21628769
- Volume :
- 8
- Database :
- OpenAIRE
- Journal :
- ECS Journal of Solid State Science and Technology
- Accession number :
- edsair.doi...........dd1adf9762bc5dcde562b5141b3dbfb9