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Damage Characteristics of n-GaN Crystal Etched with N2 Plasma by Soft X-Ray Absorption Spectroscopy
- Source :
- e-Journal of Surface Science and Nanotechnology. 14:9-13
- Publication Year :
- 2016
- Publisher :
- Surface Science Society Japan, 2016.
- Subjects :
- 010302 applied physics
Soft x ray
Materials science
Absorption spectroscopy
Analytical chemistry
Bioengineering
Gallium nitride
02 engineering and technology
Surfaces and Interfaces
Plasma
021001 nanoscience & nanotechnology
Condensed Matter Physics
Ion bombardment
01 natural sciences
Surfaces, Coatings and Films
Crystal
chemistry.chemical_compound
X-ray photoelectron spectroscopy
chemistry
Mechanics of Materials
Surface roughening
0103 physical sciences
0210 nano-technology
Biotechnology
Subjects
Details
- ISSN :
- 13480391
- Volume :
- 14
- Database :
- OpenAIRE
- Journal :
- e-Journal of Surface Science and Nanotechnology
- Accession number :
- edsair.doi...........dcf97fdd867165cf1efa029947958424
- Full Text :
- https://doi.org/10.1380/ejssnt.2016.9