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A self-consistent modeling and simulation of transformer coupled plasma discharge
- Source :
- Surface and Coatings Technology. 112:34-37
- Publication Year :
- 1999
- Publisher :
- Elsevier BV, 1999.
-
Abstract
- A self-consistent model of transformer coupled plasma (TCP) discharge is developed, combining transport and heating models. The transport model is composed of electron and ion continuity and temperature equations. The heating model covers arbitrary values of the collision frequency, including collisionless heating mechanisms and modulation effects by walls.
- Subjects :
- Materials science
Surfaces and Interfaces
General Chemistry
Plasma
Mechanics
Electron
Condensed Matter Physics
Collision
Surfaces, Coatings and Films
Ion
law.invention
Modeling and simulation
Collision frequency
Physics::Plasma Physics
law
Materials Chemistry
Plasma diagnostics
Atomic physics
Transformer
Subjects
Details
- ISSN :
- 02578972
- Volume :
- 112
- Database :
- OpenAIRE
- Journal :
- Surface and Coatings Technology
- Accession number :
- edsair.doi...........dc86b7a64ef0652647a8f9f0f5feb47f
- Full Text :
- https://doi.org/10.1016/s0257-8972(98)00746-4