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A self-consistent modeling and simulation of transformer coupled plasma discharge

Authors :
N.S. Yoon
K.-I. You
S.M. Hwang
Source :
Surface and Coatings Technology. 112:34-37
Publication Year :
1999
Publisher :
Elsevier BV, 1999.

Abstract

A self-consistent model of transformer coupled plasma (TCP) discharge is developed, combining transport and heating models. The transport model is composed of electron and ion continuity and temperature equations. The heating model covers arbitrary values of the collision frequency, including collisionless heating mechanisms and modulation effects by walls.

Details

ISSN :
02578972
Volume :
112
Database :
OpenAIRE
Journal :
Surface and Coatings Technology
Accession number :
edsair.doi...........dc86b7a64ef0652647a8f9f0f5feb47f
Full Text :
https://doi.org/10.1016/s0257-8972(98)00746-4