Fabrication of new electrostatic linear actuator

Authors :: T. Matsunaga
K. Kondoh
M. Kumagae
H. Kawara
M. Yasuda
K. Murata
Source :: Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387).
Publication Year :: 2002
Publisher :: Japan Soc. Appl. Phys, 2002.

Database :: OpenAIRE
Journal :: Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)
Accession number :: edsair.doi...........dc60b2e99d5ba7d0bf00ebd906ca4624
Full Text :: https://doi.org/10.1109/imnc.2000.872634