Back to Search Start Over

Theoretical Modeling of ALD Processes

Authors :
Charles B. Musgrave
Source :
Atomic Layer Deposition of Nanostructured Materials
Publication Year :
2011
Publisher :
Wiley, 2011.

Subjects

Subjects :
Atomic layer deposition
Molecular dynamics
Chemistry
Chemical physics
Potential energy surface
Density functional theory
Surface reaction
Molecular physics
Adsorption energy
Transition state

Details

Database :
OpenAIRE
Journal :
Atomic Layer Deposition of Nanostructured Materials
Accession number :
edsair.doi...........dc1bf60fff7aee5d6d9751e1d9147567

Tools

Authors Abstract Subjects Details